EXPERIMENTAL INVESTIGATION AND SIMULATION OF SILICON RAPID THERMAL NON-MELT ANNEALING

Ref.No: 68104400
Start date: 15.06.2011
End date: 14.06.2014
Approval date: 13.07.2011
Department: APPLIED MATHEMATICAL & PHYSICAL SCIENCES
Sector: PHYSICS
Financier: ΕΣΠΑ 2007-2013, UPOURGEIO PAIDEIAS DVM & THRISKEUMATON
Budget: 45.000,00 €
Scientific Responsible: Assoc. Prof. TSOUKALAS
Email: dtsouk@central.ntua.gr
Description: PURPOSE OF THIS RESEARCH IS THE INVESTIGATION OF THE DEVELOPMENT OF SILICON STRUCTURES UTILIZING MODERN ANNEALING TECHNOLOGIES.ANNEALING IS A FUNDAMENTAL PROCESS REQUIRED FOR THE IMPROVEMENT OF THE ELECTRICAL PROPERTIES AND THE REPAIR OF THE DAMAGE ....