COLiSA.MMP – COMPUTATIONAL LITHOGRAPHY FOR DIRECTED SELF-ASSEMBLY: MATERIALS,MODELS AND PROCESSES

Ref.No: 66020900
Start date: 01.11.2013
End date: 31.10.2016
Approval date: 21.01.2014
Department: CHEMICAL ENGINEERING
Sector: MATERIALS SCIENCE AND ENGINEERING
Financier: METAFORA APO PROGRAMMATA 63/
Budget: 11.679,86 €
Public key: ΒΙΥΗ46ΨΖΣ4-Χ1Ι
Scientific Responsible: Prof. THEODOROU
Email: doros@central.ntua.gr
Description: DIRECTED SELF-ASSEMBLY OF BLOCK COPOLYMERS IS ONE OF THE MOST PROMISING TECHNIQUES TO ENABLE THE CONTINUED MINIATURIZATION OF INTEGRATED CIRCUITS.IT COMBINES TOP-DOWN PHOTOLITHOGRAPHY FOR CREATIONOF GUIDING PATTERNS WITH ENGINEERED NEW MATERIALS AND ...
Go to Top