| Ref.No: | 61165000 |
| Start date: | 01.12.2005 |
| End date: | 30.06.2009 |
| Approval date: | 08.02.2006 |
| Department: | CHEMICAL ENGINEERING |
| Sector: | PROCESS ANALYSIS AND PLANT DESIGN |
| Financier: | ΠΕΝΕΔ 2003, G.G.E.T. |
| Budget: | 10.510,00 € |
| Scientific Responsible: | Prof. BOUDOUVIS |
| Email: | boudouvi@chemeng.ntua.gr |
| Description: | CRITICAL SUB-100nm INDUSTRIAL SCALE PATTERNS FOR CMOS-NANO ARCHITECTURES |
