| Ref.No: | 63130700 |
| Start date: | 01.12.1998 |
| End date: | 31.12.2000 |
| Approval date: | 12.04.2002 |
| Department: | CHEMICAL ENGINEERING |
| Sector: | CHEMICAL SCIENCES |
| Financier: | INTAS, E.C. |
| Budget: | 2.000,00 € |
| Scientific Responsible: | Prof. NIKOLAOS SPURELLIS |
| Email: | nspyr@chemeng.ntua.gr |
| Description: | THE MAIN GOAL OF THE PROJECT ARE TO INTEGRATE COPPER PLATED METALLIZATION IN INSULATING SYSTEMS BASED ON MATERIALS WITH LOW DIELECTRIC CONSTANTS,AND TO DEVELOP ARCHITECTURE FOR INTERCONNECTING SYSTEMS OF ULTRA-LARGE-SCALE INTEGRATION CIRCUITS. |
